Invention Grant
US09534973B2 Capacitive static and dynamic sensor 有权
电容静态和动态传感器

Capacitive static and dynamic sensor
Abstract:
A capacitive pressure sensor may be configured to transduce both a dynamic pressure and a static pressure using a single diaphragm. A capacitive pressure sensor may comprise a dynamic excitation signal module in parallel with a static excitation signal module, a summing amplifier module in connection with both the dynamic excitation module and the static excitation module, a dynamic charge amplifier stage in a parallel with a static charge amplifier stage, and a capacitive sensor connected to an output of the summing amplifier module, as well as an input of the dynamic charge amplifier stage, and an input of the static charge amplifier stage. Further, a dynamic excitation signal may be provided by the dynamic excitation signal module as a constant DC voltage signal, and a static excitation signal may be provided by the static excitation signal module as an AC voltage signal.
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