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US09535084B2 Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical rotation rate sensor by means of sigma-delta-modulation 有权
通过Σ-Δ调制方式对微机械转速传感器的正交解耦和谐振频率进行解耦

Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical rotation rate sensor by means of sigma-delta-modulation
Abstract:
A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).
Abstract(Chinese):

一种用于精确测量微机械旋转速率传感器的方法，所述微机械旋转速率传感器包括至少一个地震质量块，用于驱动主模式（q1）中的地震质量的至少一个驱动装置和共同地至少三个修整电极元件 与地震质量直接或间接相关。 在修整电极元件和地震块之间分别设置修整电压（u1，u2，u3，u4）。 根据谐振频率变量（ũT，ŨT，0），正交变量（ũc，ŨC，0）和恢复变量（ũS），调整每个微调电压（u1，u2，u3，u4）。

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