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US09535087B2 Band excitation method applicable to scanning probe microscopy 有权
带激发法适用于扫描探针显微镜

Band excitation method applicable to scanning probe microscopy
Abstract:
Scanning probe microscopy may include a method for generating a band excitation (BE) signal and simultaneously exciting a probe at a plurality of frequencies within a predetermined frequency band based on the excitation signal. A response of the probe is measured across a subset of frequencies of the predetermined frequency band and the excitation signal is adjusted based on the measured response.
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