Invention Grant
US09535096B2 Guide plate for a probe card and probe card provided with same 有权
用于探针卡和探针卡的导板与其配套

Guide plate for a probe card and probe card provided with same
Abstract:
It is an object of the invention to provide a guide plate for a probe card with fine through holes at tight pitches and with increased strength. The guide plate 100 for a probe card includes a metal base 110; first insulation layers 120; and metal layers 130. The metal base 110 has a plurality of through holes 111 to receive probes therethrough, and inner walls of the through holes 111. The first insulation layers 120 are of tuboid shape and provided on the respective inner walls of the through holes 111 of the metal base 110. The metal layers 130 are provided on the first insulation layers 120.
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