An inspection apparatus for inspecting an inspection object. The inspection object includes a base body and wiring passing through the base body. The inspection apparatus includes an insulating substrate, a first electrode in the substrate with a portion of the first electrode exposed from a surface of the substrate to form a connection portion which may be electrically connected with the wiring, and a second electrode in the substrate. The first electrode and the second electrode are spaced apart, have mutually parallel portions, and are electrically insulated from each other.