Invention Grant
US09535277B2 Conductive oxide film, display device, and method for forming conductive oxide film
有权
导电氧化膜，显示装置及形成导电氧化膜的方法
- Patent Title: Conductive oxide film, display device, and method for forming conductive oxide film
- Patent Title (中): 导电氧化膜，显示装置及形成导电氧化膜的方法
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Application No.: US14010849Application Date: 2013-08-27
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Publication No.: US09535277B2Publication Date: 2017-01-03
- Inventor: Shunpei Yamazaki , Masashi Oota
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Applicant Address: JP Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office
- Agent Eric J. Robinson
- Priority: JP2012-195401 20120905
- Main IPC: G02F1/1333
- IPC: G02F1/1333 ; G06F3/044 ; G06F3/045
Abstract:
One embodiment of the present invention provides a conductive oxide film having high conductivity and high transmittance of visible light. The conductive oxide film having high conductivity and high transmittance of visible light can be obtained by forming a conductive oxide film at a high substrate temperature in the film formation and subjecting the conductive oxide film to nitrogen annealing treatment. The conductive oxide film has a crystal structure in which c-axes are aligned in a direction perpendicular to a surface of the film.
Public/Granted literature
- US20140063368A1 CONDUCTIVE OXIDE FILM, DISPLAY DEVICE, AND METHOD FOR FORMING CONDUCTIVE OXIDE FILM Public/Granted day:2014-03-06
Information query
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