Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
- Patent Title (中): 印刷装置及制品制造方法
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Application No.: US13025436Application Date: 2011-02-11
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Publication No.: US09535321B2Publication Date: 2017-01-03
- Inventor: Hironori Maeda
- Applicant: Hironori Maeda
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-032037 20100217
- Main IPC: B29C59/02
- IPC: B29C59/02 ; G03F7/00 ; B82Y10/00 ; B82Y40/00

Abstract:
The imprint apparatus of the present invention molds an uncured resin on a substrate using a mold to form a resin pattern on the substrate. The apparatus includes a measuring device configured to project a light onto the mold, to receive a light scattered by the mold, and to measure the scattered light; and a controller. The controller is configured to store a reference signal, to cause the measuring device to measure the mold to obtain a measurement signal, and to obtain an index indicating a discrepancy between the measurement signal and the reference signal.
Public/Granted literature
- US20110198769A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2011-08-18
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