Invention Grant
US09535339B2 Exposure apparatus, exposure method, and device manufacturing method 有权
曝光装置,曝光方法和装置制造方法

  • Patent Title: Exposure apparatus, exposure method, and device manufacturing method
  • Patent Title (中): 曝光装置,曝光方法和装置制造方法
  • Application No.: US14273887
    Application Date: 2014-05-09
  • Publication No.: US09535339B2
    Publication Date: 2017-01-03
  • Inventor: Yuichi Shibazaki
  • Applicant: NIKON CORPORATION
  • Applicant Address: JP Tokyo
  • Assignee: NIKON COPORATION
  • Current Assignee: NIKON COPORATION
  • Current Assignee Address: JP Tokyo
  • Agency: Oliff PLC
  • Priority: JP2009-122337 20090520
  • Main IPC: G03F7/20
  • IPC: G03F7/20
Exposure apparatus, exposure method, and device manufacturing method
Abstract:
An exposure apparatus is equipped with a fine movement stage that can hold a liquid with a projection optical system when the stage is at a position facing an outgoing surface of the projection optical system, and a blade that comes into proximity within a predetermined distance of the fine movement stage when the fine movement stage is holding the liquid with the projection optical system, and moves along with the fine movement stage while maintaining the proximity state, and then holds the liquid with the projection optical system after the movement. Accordingly, a plurality of stages will not have to be placed right under the projection optical system interchangeably, which can suppress an increase in footprint of the exposure apparatus.
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