Invention Grant
US09536710B2 Tunable gas delivery assembly with internal diffuser and angular injection
有权
具有内部扩散器和角度注入的可调气体输送组件
- Patent Title: Tunable gas delivery assembly with internal diffuser and angular injection
- Patent Title (中): 具有内部扩散器和角度注入的可调气体输送组件
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Application No.: US13959801Application Date: 2013-08-06
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Publication No.: US09536710B2Publication Date: 2017-01-03
- Inventor: Vladimir Knyazik , Kyle Tantiwong , Samer Banna , Waheb Bishara
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, LLP
- Main IPC: F26B21/00
- IPC: F26B21/00 ; H01J37/32
Abstract:
An apparatus for providing processing gases to a process chamber with improved uniformity is disclosed. One embodiment provides a gas delivery assembly. The gas delivery assembly includes a hub, a nozzle, and one or more gas diffusers disposed in the nozzle. The nozzle has a cylindrical body with a side wall and a top surface. A plurality of injection passages are formed inside the nozzle to deliver processing gases into the process chamber via a plurality of outlets disposed in the side wall. The injection passages are configured to direct process gases out of each outlet disposed in the side wall in a direction which is not radially aligned with a centerline of the hub.
Public/Granted literature
- US20140237840A1 TUNABLE GAS DELIVERY ASSEMBLY WITH INTERNAL DIFFUSER AND ANGULAR INJECTION Public/Granted day:2014-08-28
Information query
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