Invention Grant
- Patent Title: Semiconductor stocker systems and methods
- Patent Title (中): 半导体储备器系统和方法
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Application No.: US13537009Application Date: 2012-06-28
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Publication No.: US09536763B2Publication Date: 2017-01-03
- Inventor: Lutz Rebstock
- Applicant: Lutz Rebstock
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/673
Abstract:
In an embodiment, the present invention discloses cleaned storage processes and systems for high level cleanliness articles, such as extreme ultraviolet (EUV) reticle carriers. A decontamination chamber can be used to clean the stored workpieces. A purge gas system can be used to prevent contamination of the articles stored within the workpieces. A robot can be used to detect the condition of the storage compartment before delivering the workpiece. A monitor device can be used to monitor the conditions of the stocker.
Public/Granted literature
- US20130000676A1 Semiconductor stocker systems and methods Public/Granted day:2013-01-03
Information query
IPC分类:
