Invention Grant
US09536791B2 Stable multiple threshold voltage devices on replacement metal gate CMOS devices
有权
在替换金属栅极CMOS器件上稳定的多个阈值电压器件
- Patent Title: Stable multiple threshold voltage devices on replacement metal gate CMOS devices
- Patent Title (中): 在替换金属栅极CMOS器件上稳定的多个阈值电压器件
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Application No.: US14748424Application Date: 2015-06-24
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Publication No.: US09536791B2Publication Date: 2017-01-03
- Inventor: Su Chen Fan , Sivananda K. Kanakasabapathy , Injo Ok , Tenko Yamashita
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/304
- IPC: H01L21/304 ; H01L21/8234 ; H01L29/66 ; H01L21/283

Abstract:
A technique for a multiple voltage threshold transistor structure is provided. A narrow channel and long channel are formed on a fin. An epitaxial layer is formed on the fin, and an interlayer dielectric layer is formed on the epitaxial layer. Spacers on the fin define the narrow channel and the long channel. A high-k dielectric material is deposited in the narrow and long channels. A metal layer is deposited on the high-k dielectric material in the narrow and long channels. A height of the high-k dielectric material in the narrow channel is recessed. The metal layer is removed from the narrow and long channels. A work function metal is deposited in the narrow and long channels. A gate conduction metal is deposited to fill the narrow channel and long channel. A capping layer is deposited on the top surface of the structure.
Public/Granted literature
- US20160293493A1 STABLE MULTIPLE THRESHOLD VOLTAGE DEVICES ON REPLACEMENT METAL GATE CMOS DEVICES Public/Granted day:2016-10-06
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