Invention Grant
- Patent Title: Bump pad structure
- Patent Title (中): 凸块结构
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Application No.: US14884438Application Date: 2015-10-15
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Publication No.: US09536847B2Publication Date: 2017-01-03
- Inventor: Hsiu-Ping Wei , Hsien-Wei Chen , Hao-Yi Tsai , Ying-Ju Chen , Yu-Wen Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/768 ; H01L23/48

Abstract:
An embodiment is a bump bond pad structure that comprises a substrate comprising a top layer, a reinforcement pad disposed on the top layer, an intermediate layer above the top layer, an intermediate connection pad disposed on the intermediate layer, an outer layer above the intermediate layer, and an under bump metal (UBM) connected to the intermediate connection pad through an opening in the outer layer. Further embodiments may comprise a via mechanically coupling the intermediate connection pad to the reinforcement pad. The via may comprise a feature selected from the group consisting of a solid via, a substantially ring-shaped via, or a five by five array of vias. Yet, a further embodiment may comprise a secondary reinforcement pad, and a second via mechanically coupling the reinforcement pad to the secondary reinforcement pad.
Public/Granted literature
- US20160035684A1 Bump Pad Structure Public/Granted day:2016-02-04
Information query
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