Invention Grant
US09536856B2 Flip chip bonder and flip chip bonding method 有权
倒装芯片接合器和倒装芯片接合方法

Flip chip bonder and flip chip bonding method
Abstract:
Provided is a flip chip bonder including: a pickup flipping collet configured to flip a chip; and a bonding tool configured to receive the chip flipped with the pickup flipping collet from the pickup flipping collet and to bond the received chip to a circuit board. The pickup flipping collet includes a cooling channel through which cooling air flows to cool the pickup flipping collet. Thus, bonding time can be reduced without lowering bonding quality.
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