Invention Grant
- Patent Title: Method of transferring thin film, method of manufacturing thin film transistor, method of forming pixel electrode of liquid crystal display device
- Patent Title (中): 薄膜转移方法，薄膜晶体管的制造方法，液晶显示装置的像素电极的形成方法
-
Application No.: US14798964Application Date: 2015-07-14
-
Publication No.: US09536912B2Publication Date: 2017-01-03
- Inventor: Makoto Nakazumi , Yasutaka Nishi
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Priority: JP2013-027594 20130215
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L27/12 ; G02F1/1368 ; H01L21/20 ; H01L29/786 ; G02F1/136
Abstract:
A method of transferring a thin film is a method of transferring a thin film formed on a first substrate to a second substrate, the method including: allowing the first substrate to come into contact with a liquid to swell the first substrate; allowing the second substrate and the thin film to come into contact with each other via the liquid; and drying the liquid to allow the thin film to adhere to the second substrate.
Public/Granted literature
Information query
IPC分类:
