Invention Grant
US09536925B1 Injection pillar definition for line MRAM by a self-aligned sidewall transfer
有权
注射柱定义通过自对准侧壁转移线MRAM
- Patent Title: Injection pillar definition for line MRAM by a self-aligned sidewall transfer
- Patent Title (中): 注射柱定义通过自对准侧壁转移线MRAM
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Application No.: US14920538Application Date: 2015-10-22
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Publication No.: US09536925B1Publication Date: 2017-01-03
- Inventor: Anthony J. Annunziata , Joel D. Chudow , Michael C. Gaidis , Rohit Kilaru
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L43/08 ; H01L43/12 ; H01L27/22 ; G11C11/16

Abstract:
A technique relates to an MRAM system. A conformal film covers trenches formed in an upper material. The upper material covers conductive islands in a substrate. The conformal film is selectively etched to leave sidewalls on the trenches. The sidewalls are etched into vertical columns self-aligned to and directly on top of the conductive islands below. A filling material is deposited and planarized to leave exposed tops of the vertical columns. An MTJ element is formed on top of the filling material and exposed tops of the vertical columns. The MTJ element is patterned into lines corresponding to the vertical columns, and each of the lines has a line MTJ element self-aligned to one of the vertical columns. Line MRAM devices are formed by patterning the MTJ element into the lines. Each of line MRAM devices respectively include the line MTJ element self-aligned to the one of the vertical columns.
Public/Granted literature
- US20160380027A1 INJECTION PILLAR DEFINITION FOR LINE MRAM BY A SELF-ALIGNED SIDEWALL TRANSFER Public/Granted day:2016-12-29
Information query
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