Invention Grant
- Patent Title: Semiconductor device and semiconductor device manufacturing method
- Patent Title (中): 半导体器件和半导体器件制造方法
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Application No.: US14397073Application Date: 2013-04-22
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Publication No.: US09536998B2Publication Date: 2017-01-03
- Inventor: Yuki Nakano , Ryota Nakamura , Hiroyuki Sakairi
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2012-103862 20120427
- International Application: PCT/JP2013/061765 WO 20130422
- International Announcement: WO2013/161753 WO 20131031
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/3205 ; H01L29/78 ; H01L21/04 ; H01L29/423 ; H01L29/40 ; H01L29/417 ; H01L29/10 ; H01L21/02 ; H01L29/16 ; H01L29/06 ; H01L21/324

Abstract:
[Problem] To provide a semiconductor device wherein withstand voltage of a gate insulating film at the upper edge of a trench is improved, and a method for manufacturing the semiconductor device.[Solution] A semiconductor device (1) includes: an n-type SiC substrate (2) having a gate trench (9) formed therein; a gate insulating film (16), which integrally includes a side-surface insulating film (18) and a bottom-surface insulating film (19); and a gate electrode (15) which is embedded in the gate trench (9), and which selectively has an overlap portion (17) that overlaps, at the upper edge (26), the surface (21) of the SiC substrate (2). In the side-surface insulating film (18), an overhung portion (27) that is selectively thick compared with other portions of the side-surface insulating film (18) is formed such that the overhung portion protrudes, at the upper end edge (26), toward the inside of the gate trench (9).
Public/Granted literature
- US20150295079A1 SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD Public/Granted day:2015-10-15
Information query
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