Invention Grant
- Patent Title: Method for manufacturing solar-power-generator substrate and apparatus for manufacturing solar-power-generator substrate
- Patent Title (中): 太阳能发电机基板的制造方法以及太阳能发电用基板的制造装置
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Application No.: US14890309Application Date: 2014-06-12
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Publication No.: US09537026B2Publication Date: 2017-01-03
- Inventor: Hajime Tsugeno , Mitsuhiro Nonogaki , Junji Kobayashi , Yusuke Oshiro , Takahiro Kawasaki , Shoichi Karakida
- Applicant: MITSUBISHI ELECTRIC CORPORATION
- Applicant Address: JP Chiyoda-Ku, Tokyo
- Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee Address: JP Chiyoda-Ku, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2013-131584 20130624
- International Application: PCT/JP2014/065648 WO 20140612
- International Announcement: WO2014/208353 WO 20141231
- Main IPC: H01L21/331
- IPC: H01L21/331 ; H01L21/8222 ; H01L31/0236 ; H01L31/18

Abstract:
A method for manufacturing a solar-power-generator substrate by cutting out a semiconductor substrate by slicing a semiconductor ingot and then by forming a texture structure on a surface of the semiconductor substrate by performing a surface treatment on the surface of the semiconductor substrate, includes: cleaning including cleaning and removing an organic impurity and a metal impurity adhering to the surface of the semiconductor substrate with a cleaning fluid containing an oxidizing chemical; and etching including removing a damaged layer on a substrate surface generated by the slicing and forming the texture structure on the surface of the semiconductor substrate by performing anisotropic etching on the surface of the semiconductor substrate with an alkaline aqueous solution, the etching being performed subsequent to the cleaning.
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