Invention Grant
- Patent Title: Wet etching method for an N-type bifacial cell
- Patent Title (中): N型双面电池的湿式蚀刻方法
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Application No.: US15028665Application Date: 2015-05-14
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Publication No.: US09537037B2Publication Date: 2017-01-03
- Inventor: Fei Zheng , Zhongwei Zhang , Lei Shi , Zhongli Ruan , Chen Zhao , Yuxue Zhao
- Applicant: Shanghai Shenzhou New Energy Development Co., Ltd.
- Applicant Address: CN Shanghai
- Assignee: Shanghai Shenzhou New Energy Development Co., Ltd.
- Current Assignee: Shanghai Shenzhou New Energy Development Co., Ltd.
- Current Assignee Address: CN Shanghai
- Agency: Wang Law Firm, Inc.
- Priority: CN201410525546 20141008
- International Application: PCT/CN2015/078932 WO 20150514
- International Announcement: WO2016/054917 WO 20160414
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/068 ; H01L31/18

Abstract:
A wet etching method for an N-type bifacial cell including: (1) providing an N-type silicon wafer, proceeding with surface structuralization on the N-type silicon wafer, and producing a PN junction on a surface of the N-type silicon wafer by using a boron diffusion technique; (2) proceeding with a first mixed acid washing, etching the PN junction on an edge and a back surface of the N-type silicon wafer; (3) proceeding with a first pure water washing and a first alkaline washing, removing residual acid solution from the surface of the N-type silicon wafer; (4) proceeding with a second pure water washing and a second mixed acid washing, removing residual impurities from the surface of the N-type silicon wafer; (5) proceeding with a third pure water washing and air drying; and (6) after air drying, completing etching on the N-type bifacial cell.
Public/Granted literature
- US20160329451A1 Wet Etching Method for an N-type Bifacial Cell Public/Granted day:2016-11-10
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