Invention Grant
US09537040B2 Complementary metal-oxide-semiconductor image sensor and manufacturing method thereof
有权
互补金属氧化物半导体图像传感器及其制造方法
- Patent Title: Complementary metal-oxide-semiconductor image sensor and manufacturing method thereof
- Patent Title (中): 互补金属氧化物半导体图像传感器及其制造方法
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Application No.: US13891153Application Date: 2013-05-09
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Publication No.: US09537040B2Publication Date: 2017-01-03
- Inventor: Ching-Hung Kao
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L27/146

Abstract:
A method for manufacturing semiconductor devices includes following steps. A substrate having a pixel region and a periphery region defined thereon is provided, and at least a transistor is formed in the pixel region. A blocking layer is formed on the substrate, and the blocking layer includes a first opening exposing a portion of the substrate in the pixel region and a second opening exposing a portion of the transistor. A first conductive body is formed in the first opening and a second conductive body is formed in the second opening, respectively. The first conductive body protrudes from the substrate and the second conductive body protrudes from the transistor. A portion of the blocking layer is removed. A first salicide layer is formed on the first conductive body and a second salicide layer is formed on the second conductive body, respectively.
Public/Granted literature
- US20140332868A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2014-11-13
Information query
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