Invention Grant
- Patent Title: Retainer ring, polish apparatus, and polish method
- Patent Title (中): 保持环,抛光装置和抛光方法
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Application No.: US14578845Application Date: 2014-12-22
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Publication No.: US09539696B2Publication Date: 2017-01-10
- Inventor: Dai Fukushima , Takashi Watanabe , Jun Takayasu
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-269506 20131226
- Main IPC: B24B37/32
- IPC: B24B37/32 ; B24B37/10 ; B24B37/04

Abstract:
A retainer ring configured to be attachable, at a first side thereof, to a polish head of a polish apparatus configured to polish a polish object by depressing the polish object against a polish pad is disclosed. The retainer ring is configured to depress the polish pad at a second side thereof. The retainer ring includes a contact surface contacting the polish pad. The contact surface applies depressing force on the polish pad. The depressing force is directed from a polish head side and is applied so as to be centered on an imaginary circle of pressure center having a radius falling substantially in a middle of an inner radius of the retainer ring and an outer radius of the retainer ring. An area of the contact surface is greater in a first region inside the circle of pressure center than in a second region outside the circle of pressure center.
Public/Granted literature
- US20150183082A1 RETAINER RING, POLISH APPARATUS, AND POLISH METHOD Public/Granted day:2015-07-02
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