Invention Grant
- Patent Title: System and method for a MEMS transducer
- Patent Title (中): MEMS传感器的系统和方法
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Application No.: US14717556Application Date: 2015-05-20
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Publication No.: US09540226B2Publication Date: 2017-01-10
- Inventor: Wolfgang Klein , Martin Wurzer , Stefan Barzen , Alfons Dehe
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; B81C1/00

Abstract:
According to an embodiment, a microelectromechanical systems (MEMS) transducer includes a first electrode, a second electrode fixed to an anchor at a perimeter of the second electrode, and a mechanical support separate from the anchor at the perimeter of the second electrode and mechanically connected to the first electrode and the second electrode. The mechanical support is fixed to a portion of the second electrode such that, during operation, a maximum deflection of the second electrode occurs between the mechanical structure and the perimeter of the second electrode.
Public/Granted literature
- US20160340173A1 SYSTEM AND METHOD FOR A MEMS TRANSDUCER Public/Granted day:2016-11-24
Information query
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