Invention Grant
- Patent Title: Resist copolymer and resist composition
- Patent Title (中): 抗蚀剂共聚物和抗蚀剂组成
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Application No.: US14300558Application Date: 2014-06-10
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Publication No.: US09540468B2Publication Date: 2017-01-10
- Inventor: Keisuke Kato , Atsushi Yasuda , Ryuichi Ansai , Shinichi Maeda
- Applicant: Mitsubishi Rayon Co., Ltd.
- Applicant Address: JP Chiyoda-ku
- Assignee: Mitsubishi Rayon Co., Ltd.
- Current Assignee: Mitsubishi Rayon Co., Ltd.
- Current Assignee Address: JP Chiyoda-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-126018 20130614; JP2014-000356 20140106
- Main IPC: C08F220/18
- IPC: C08F220/18 ; C08F220/28 ; G03F7/039 ; C08F220/42 ; G03F7/023

Abstract:
Provided is a resist copolymer which has favorable sensitivity, enables a resist pattern to be formed to have a favorable shape, has favorable dry etching resistance when a dry etching is carried out using the resist pattern as a mask, and suppresses the surface roughness of a pattern formed by carrying out a dry etching process to a substrate.A resist copolymer including a constituent unit (1) based on a (meth)acrylic acid ester derivative having a cyclic hydrocarbon group such as an adamantane ring and two or more cyano groups bonded to the cyclic hydrocarbon group, a constituent unit (2) having a lactone backbone and a cross-linking cyclic structure, and a constituent unit (3) having an acid leaving group.
Public/Granted literature
- US20140371412A1 RESIST COPOLYMER AND RESIST COMPOSITION Public/Granted day:2014-12-18
Information query
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