Invention Grant
- Patent Title: Aromatic resins for underlayers
- Patent Title (中): 用于底层的芳香族树脂
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Application No.: US14569610Application Date: 2014-12-12
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Publication No.: US09540476B2Publication Date: 2017-01-10
- Inventor: Li Cui , Sung Wook Cho , Mingqi Li , Shintaro Yamada , Peter Trefonas, III , Robert L. Auger
- Applicant: Rohm and Haas Electronic Materials LLC , Rohm and Haas Electronic Materials Korea Ltd.
- Applicant Address: US MA Marlborough KR
- Assignee: Rohm and Haas Electronic Materials LLC,Rohm and Haas Electronic Materials Korea Ltd.
- Current Assignee: Rohm and Haas Electronic Materials LLC,Rohm and Haas Electronic Materials Korea Ltd.
- Current Assignee Address: US MA Marlborough KR
- Agent S. Matthew Cairns
- Main IPC: G03F7/09
- IPC: G03F7/09 ; C08G8/08 ; C09D161/06 ; C08G8/04
Abstract:
Polymeric reaction products of certain aromatic alcohols with certain aromatic aldehydes are useful as underlayers in semiconductor manufacturing processes.
Public/Granted literature
- US20150166711A1 AROMATIC RESINS FOR UNDERLAYERS Public/Granted day:2015-06-18
Information query
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