A method comprises contacting a compound having formulae (1) with a compound having formula MLo to form a metal: [M(SiR3)m(L1)p]n  (1) wherein M is Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Al, a second row transition metal or a third row transition metal; R are each independently H, C1-C6 alkyl or —Si(R″)3; R″ are each independently H or C1-C6 alkyl; m is an integer from 1 to 3; n is a number representing the formation of aggregates or polymeric material; L1 is a neutral donor ligand; L is a ligand; p is an integer from 0 to 6; and o is an integer representing the number of ligands bonded to MLo.