Invention Grant
US09540731B2 Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads 有权
可重新配置的多区域气体输送硬件,用于衬底处理花洒

Reconfigurable multi-zone gas delivery hardware for substrate processing showerheads
Abstract:
Reconfigurable showerheads used in process chambers for substrate processing are provided herein. In some embodiments, a reconfigurable showerhead may include a body having one or more plenums disposed therein; and one or more inserts configured to be disposed within the one or more plenums, wherein the one or more inserts divide the reconfigurable showerhead into a plurality of zones. In some embodiments, a substrate processing system may include a process chamber having a reconfigurable showerhead coupled to a gas supply for providing one or more process gases to the process chamber, the reconfigurable showerhead including a body having one or more plenums disposed therein and one or more inserts configured to be disposed within the one or more plenums, wherein the one or more inserts divide the reconfigurable showerhead into a plurality of zones.
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