Invention Grant
US09540744B2 Apparatus for fabricating silicon carbide single crystal ingot and method for fabricating ingot 有权
用于制造碳化硅单晶锭的装置及其制造方法

Apparatus for fabricating silicon carbide single crystal ingot and method for fabricating ingot
Abstract:
An apparatus for fabricating an ingot according to the embodiment comprises a crucible for receiving a raw material; and a filter part for selectively filtering a specific component in the crucible, wherein the filter part comprises a polymer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0