Invention Grant
US09541377B1 Apparatus for real-time non-contact non-destructive thickness measurement using terahertz wave
有权
使用太赫兹波进行实时非接触非破坏性厚度测量的装置
- Patent Title: Apparatus for real-time non-contact non-destructive thickness measurement using terahertz wave
- Patent Title (中): 使用太赫兹波进行实时非接触非破坏性厚度测量的装置
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Application No.: US14936275Application Date: 2015-11-09
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Publication No.: US09541377B1Publication Date: 2017-01-10
- Inventor: Dae-Su Yee , Ji Sang Yahng
- Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Applicant Address: KR Daejeon
- Assignee: Korea Research Institute of Standards and Science
- Current Assignee: Korea Research Institute of Standards and Science
- Current Assignee Address: KR Daejeon
- Agency: Alleman Hall McCoy Russell & Tuttle LLP
- Priority: KR10-2015-0093296 20150630
- Main IPC: G01B11/06
- IPC: G01B11/06

Abstract:
Provided is an apparatus for real-time non-contact non-destructive thickness measurement using a terahertz wave, and more particularly, an apparatus for real-time non-contact non-destructive thickness measurement using a terahertz wave, which is capable of measuring a thickness of a sample by irradiating a terahertz continuous wave, which is generated from a wavelength-fixed laser and a wavelength-swept laser and of which the frequency is changed at a high speed, to the sample and measuring the terahertz wave transmitting or reflected from the sample.
Public/Granted literature
- US20170003116A1 APPARATUS FOR REAL-TIME NON-CONTACT NON-DESTRUCTIVE THICKNESS MEASUREMENT USING TERAHERTZ WAVE Public/Granted day:2017-01-05
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