Invention Grant
US09541460B2 Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object 有权
物理量传感器,压力传感器,高度计,电子设备和移动物体

Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object
Abstract:
A physical quantity sensor includes a semiconductor substrate, a diaphragm section that is disposed on the semiconductor substrate and is flexurally deformed when receiving pressure, a sensor element that is disposed on the diaphragm section, an element-periphery structure member that is disposed on one surface side of the semiconductor substrate and forms a cavity section together with the diaphragm section, and a semiconductor circuit that is provided on the same surface side as the element-periphery structure member of the semiconductor substrate.
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