Invention Grant
US09541460B2 Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object
有权
物理量传感器,压力传感器,高度计,电子设备和移动物体
- Patent Title: Physical quantity sensor, pressure sensor, altimeter, electronic apparatus, and moving object
- Patent Title (中): 物理量传感器,压力传感器,高度计,电子设备和移动物体
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Application No.: US14932204Application Date: 2015-11-04
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Publication No.: US09541460B2Publication Date: 2017-01-10
- Inventor: Yusuke Matsuzawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-261887 20131218
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L7/08 ; H01L27/07 ; H01L41/04 ; G01C5/06 ; G01C21/28 ; G01L9/08 ; G01C5/00

Abstract:
A physical quantity sensor includes a semiconductor substrate, a diaphragm section that is disposed on the semiconductor substrate and is flexurally deformed when receiving pressure, a sensor element that is disposed on the diaphragm section, an element-periphery structure member that is disposed on one surface side of the semiconductor substrate and forms a cavity section together with the diaphragm section, and a semiconductor circuit that is provided on the same surface side as the element-periphery structure member of the semiconductor substrate.
Public/Granted literature
- US20160054188A1 PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT Public/Granted day:2016-02-25
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