Invention Grant
US09541466B2 Leak test apparatus and leak test method 有权
泄漏试验装置和泄漏试验方法

Leak test apparatus and leak test method
Abstract:
A leak test apparatus that tests for a leak in a workpiece includes a plate; a seal that is able to move relative to the plate and is supported by the plate; a driving portion that supports the plate and moves the plate; and a pressure chamber that is surrounded by the plate and the seal. The seal is formed in a shape that enables the pressure chamber to be communicated with an outside.
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