Invention Grant
- Patent Title: Multivariate prediction of a batch manufacturing process
- Patent Title (中): 批量生产过程的多变量预测
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Application No.: US14158914Application Date: 2014-01-20
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Publication No.: US09541471B2Publication Date: 2017-01-10
- Inventor: Chris Peter McCready
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: G05B23/02
- IPC: G05B23/02 ; G01M99/00
Abstract:
A method and system for predicting prospective behavior of a manufacturing process are described. Measured values of multiple variables, including at least one dependent variable, are received. A partial least squares (PLS) regression approach is used to estimate an unknown future value of the at least one dependent variable at a future point in time in a current batch run.
Public/Granted literature
- US20140136146A1 MULTIVARIATE PREDICTION OF A BATCH MANUFACTURING PROCESS Public/Granted day:2014-05-15
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