Invention Grant
- Patent Title: Inspection apparatus for article storage facility
- Patent Title (中): 物品储存设备检验设备
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Application No.: US14308158Application Date: 2014-06-18
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Publication No.: US09541534B2Publication Date: 2017-01-10
- Inventor: Hiroshi Otsuka , Shinsuke Kawamura , Tadahiro Yoshimoto
- Applicant: Daifuku Co., Ltd.
- Applicant Address: JP Osaka-shi
- Assignee: Daifuku Co., Ltd.
- Current Assignee: Daifuku Co., Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: The Webb Law Firm
- Priority: JP2013-134265 20130626
- Main IPC: G01N33/00
- IPC: G01N33/00 ; H01L21/673 ; H01L21/677 ; H01L21/67

Abstract:
An inspection apparatus used for an article storage facility includes an inactive gas supply portion provided with a supply nozzle provided in a placement support portion. A transport container having a supply port for an inactive gas is formed at a bottom portion thereof for accommodating substrates in a sealed state. The nozzle is joined to the supply port by a self weight of the transport container supported on the placement support portion so as to inject the inactive gas to an interior of the transport container. An inspection supply port is joined to the supply nozzle by a self weight of the inspection apparatus supported on the placement support portion, and is configured such that a gravity center position is supported on the placement support portion and coincides with a gravity center position of the transport container, the supply port inspects a state of supply of the inactive gas in the state of being supported on the placement support portion.
Public/Granted literature
- US20150000372A1 Inspection Apparatus for Article Storage Facility Public/Granted day:2015-01-01
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