Invention Grant
US09541534B2 Inspection apparatus for article storage facility 有权
物品储存设备检验设备

Inspection apparatus for article storage facility
Abstract:
An inspection apparatus used for an article storage facility includes an inactive gas supply portion provided with a supply nozzle provided in a placement support portion. A transport container having a supply port for an inactive gas is formed at a bottom portion thereof for accommodating substrates in a sealed state. The nozzle is joined to the supply port by a self weight of the transport container supported on the placement support portion so as to inject the inactive gas to an interior of the transport container. An inspection supply port is joined to the supply nozzle by a self weight of the inspection apparatus supported on the placement support portion, and is configured such that a gravity center position is supported on the placement support portion and coincides with a gravity center position of the transport container, the supply port inspects a state of supply of the inactive gas in the state of being supported on the placement support portion.
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