Invention Grant
US09543122B2 Method for controlling an RF generator 有权
用于控制RF发生器的方法

Method for controlling an RF generator
Abstract:
In one embodiment, an RF generator includes an RF amplifier that includes an RF input, a DC input, and an RF output, the RF amplifier configured to receive at the RF input an RF signal from an RF source; receive at the DC input a DC voltage from a DC source; and provide an output power at the RF output; and a control unit operably coupled to the DC source and the RF source, the control unit configured to receive a power setpoint for the RF output; determine a power dissipation at the RF generator; and alter the DC voltage to a final DC voltage that decreases the power dissipation at the RF generator while enabling the output power at the RF output to be substantially equal to the power setpoint.
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