Invention Grant
- Patent Title: External gettering method and device
- Patent Title (中): 外部吸气方法和装置
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Application No.: US14931806Application Date: 2015-11-03
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Publication No.: US09543166B2Publication Date: 2017-01-10
- Inventor: Michael Tan , Cheng P. Pour
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/76 ; H01L21/46 ; H01L21/322 ; B32B7/12 ; H01J7/18 ; H01L23/20 ; H01L23/28 ; H01L23/26 ; H01L21/56 ; H01L23/00 ; H01L27/146 ; H01L31/18 ; H01L51/52 ; H01L23/31

Abstract:
Disclosed embodiments include external gettering provided by electronic packaging. An external gettering element for a semiconductor substrate, which may be incorporated as part of an electronic packaging for the structure, is disclosed. Semiconductor structures and stacked semiconductor structures including an external gettering element are also disclosed. An encapsulation mold compound providing external gettering is also disclosed. Methods of fabricating such devices are also disclosed.
Public/Granted literature
- US20160056051A1 EXTERNAL GETTERING METHOD AND DEVICE Public/Granted day:2016-02-25
Information query
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