Invention Grant
- Patent Title: Electrostatic chuck
- Patent Title (中): 静电吸盘
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Application No.: US14373976Application Date: 2012-06-27
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Publication No.: US09543184B2Publication Date: 2017-01-10
- Inventor: Hiroshi Ono
- Applicant: Hiroshi Ono
- Applicant Address: JP Kyoto-shi, Kyoto
- Assignee: KYOCERA CORPORATION
- Current Assignee: KYOCERA CORPORATION
- Current Assignee Address: JP Kyoto-shi, Kyoto
- Agency: Volpe and Koenig, P.C.
- Priority: JP2012-014336 20120126
- International Application: PCT/JP2012/066397 WO 20120627
- International Announcement: WO2013/111363 WO 20130801
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H02N13/00
Abstract:
The present invention is an electrostatic chuck including a ceramic base body and an adsorption electrode provided inside of or on the lower surface of the ceramic base body and having a portion where a Mn content is 1×10−4% by mass or less in a region from the upper surface of the ceramic base body to the adsorption electrode.
Public/Granted literature
- US20150049410A1 ELECTROSTATIC CHUCK Public/Granted day:2015-02-19
Information query
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