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US09543230B2 Semiconductor device and method of manufacturing the same 有权
半导体装置及其制造方法

Semiconductor device and method of manufacturing the same
Abstract:
The semiconductor device includes first interlayer insulating layers and first conductive patterns which are alternately stacked; a second interlayer insulating layer formed on the first interlayer insulating layers and the first conductive patterns; and a slit passing through the second interlayer insulating layer, the first interlayer insulating layers and the first conductive patterns to divide the first interlayer insulating layers and the first conductive patterns into stack structures.
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