Invention Grant
- Patent Title: Bonding wire for semiconductor device use and method of production of same
- Patent Title (中): 半导体器件用接合线及其制造方法
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Application No.: US14893789Application Date: 2015-03-31
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Publication No.: US09543266B2Publication Date: 2017-01-10
- Inventor: Takashi Yamada , Daizo Oda , Ryo Oishi , Teruo Haibara , Tomohiro Uno
- Applicant: Nippon Micrometal Corporation , Nippon Steel & Sumikin Materials Co., Ltd.
- Applicant Address: JP Saitama JP Tokyo
- Assignee: NIPPON MICROMETAL CORPORATION,NIPPON STEEL & SUMIKIN MATERIALS CO., LTD
- Current Assignee: NIPPON MICROMETAL CORPORATION,NIPPON STEEL & SUMIKIN MATERIALS CO., LTD
- Current Assignee Address: JP Saitama JP Tokyo
- Agency: Andrews Kurth Kenyon LLP
- Priority: JP2014-072649 20140331
- International Application: PCT/JP2015/060041 WO 20150331
- International Announcement: WO2015/152197 WO 20151008
- Main IPC: H01B5/00
- IPC: H01B5/00 ; H01L23/00 ; B21C1/00 ; C22C5/06 ; C22C5/08 ; C22F1/00 ; C22F1/14

Abstract:
Bonding wire for semiconductor device use where both leaning failures and spring failures are suppressed by (1) in a cross-section containing the wire center and parallel to the wire longitudinal direction (wire center cross-section), there are no crystal grains with a ratio a/b of a long axis “a” and a short axis “b” of 10 or more and with an area of 15 μm2 or more (“fiber texture”), (2) when measuring a crystal direction in the wire longitudinal direction in the wire center cross-section, the ratio of crystal direction with an angle difference with respect to the wire longitudinal direction of 15° or less is, by area ratio, 10% to less than 50%, and (3) when measuring a crystal direction in the wire longitudinal direction at the wire surface, the ratio of crystal direction with an angle difference with respect to the wire longitudinal direction of 15° or less is, by area ratio, 70% or more. During the drawing step, a drawing operation with a rate of reduction of area of 15.5% or more is performed at least once. The final heat treatment temperature and the pre-final heat treatment temperature are made predetermined ranges.
Public/Granted literature
- US20160104687A1 BONDING WIRE FOR SEMICONDUCTOR DEVICE USE AND METHOD OF PRODUCTION OF SAME Public/Granted day:2016-04-14
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