Invention Grant
- Patent Title: Integrated circuit and method for fabricating an integrated circuit equipped with a temperature probe
- Patent Title (中): 用于制造配备有温度探针的集成电路的集成电路和方法
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Application No.: US14135937Application Date: 2013-12-20
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Publication No.: US09543287B2Publication Date: 2017-01-10
- Inventor: Severine Cheramy
- Applicant: Commissariat à l'énergie atomique et aux énergies alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee: Commissariat à l'énergie atomique et aux énergies alternatives
- Current Assignee Address: FR Paris
- Agency: Occhiuti & Rohlicek LLP
- Priority: FR1262813 20121226
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L27/02 ; H01L23/34 ; H01L23/38 ; H01L23/498

Abstract:
This integrated circuit comprises: a substrate, a first electrical conductor comprising a first end, the first electrical conductor being electrically insulated from the substrate, a second electrical conductor comprising a second end, the second electrical conductor being electrically insulated from the substrate and electrically insulated from the first electrical conductor except at the second end which is mechanically and electrically directly in contact with the first end to form an electrical junction. The first and second ends are entirely buried to at least 5 μm depth inside the substrate and produced, respectively, in different first and second materials chosen for the absolute value of the Seebeck coefficient of the junction to be greater than 1 μV/K at 20° C. such that the combination of these first and second conductors forms a temperature probe.
Public/Granted literature
- US20140183533A1 INTEGRATED CIRCUIT AND METHOD FOR FABRICATING AN INTEGRATED CIRCUIT EQUIPPED WITH A TEMPERATURE PROBE Public/Granted day:2014-07-03
Information query
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