Invention Grant
US09543302B2 Forming IV fins and III-V fins on insulator 有权
在绝缘体上形成IV鳍和III-V鳍

Forming IV fins and III-V fins on insulator
Abstract:
A semiconductor structure including: a set of first fins in a pFET region and a set of second fins in an nFET region, the first fins and the second fins are on a buried insulator layer, the first fins have a bottom surface coplanar with a bottom surface of the second fins, the first fins have a first pitch between adjacent first fins that is equal to a second pitch between adjacent second fins, the first fins include a group IV semiconductor material, the second fins include a group III-V semiconductor material.
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