Invention Grant
- Patent Title: Method for manufacturing a nonvolatile memory device
- Patent Title (中): 非易失性存储器件的制造方法
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Application No.: US14943680Application Date: 2015-11-17
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Publication No.: US09543312B1Publication Date: 2017-01-10
- Inventor: Do-Young Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si
- Assignee: SK HYNIX INC.
- Current Assignee: SK HYNIX INC.
- Current Assignee Address: KR Icheon-si
- Agency: William Park & Associates Ltd.
- Priority: KR10-2015-0098959 20150713
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/66 ; H01L21/265 ; H01L21/28 ; H01L29/36 ; H01L29/423 ; H01L29/788

Abstract:
A method for manufacturing a nonvolatile memory device in accordance with an embodiment of the present invention may include providing a substrate comprising a cell region and a peripheral region, wherein the peripheral region comprises an NMOS region and a PMOS region; performing a well forming ion implantation over the substrate in the cell region and the NMOS region; performing a threshold voltage adjusting ion implantation over a surface of the substrate in the cell region and the NMOS region; forming a gate pattern comprising a floating gate electrode in the cell region and the peripheral region; and performing a junction ion implantation over a surface of the cell region, wherein the floating gate electrode may have P-type conductivity.
Public/Granted literature
- US20170018559A1 METHOD FOR MANUFACTURING A NONVOLATILE MEMORY DEVICE Public/Granted day:2017-01-19
Information query
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