Invention Grant
US09543312B1 Method for manufacturing a nonvolatile memory device 有权
非易失性存储器件的制造方法

Method for manufacturing a nonvolatile memory device
Abstract:
A method for manufacturing a nonvolatile memory device in accordance with an embodiment of the present invention may include providing a substrate comprising a cell region and a peripheral region, wherein the peripheral region comprises an NMOS region and a PMOS region; performing a well forming ion implantation over the substrate in the cell region and the NMOS region; performing a threshold voltage adjusting ion implantation over a surface of the substrate in the cell region and the NMOS region; forming a gate pattern comprising a floating gate electrode in the cell region and the peripheral region; and performing a junction ion implantation over a surface of the cell region, wherein the floating gate electrode may have P-type conductivity.
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