Invention Grant
- Patent Title: Semiconductor memory device and method of fabricating the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US14668938Application Date: 2015-03-25
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Publication No.: US09543316B2Publication Date: 2017-01-10
- Inventor: Hyunmin Lee , Changseok Kang , Jongwon Kim , Hyeong Park
- Applicant: Hyunmin Lee , Changseok Kang , Jongwon Kim , Hyeong Park
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2014-0101761 20140807
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L23/535

Abstract:
Inventive concepts provide semiconductor memory devices and methods of fabricating the same. A stack structure and vertical channel structures are provided on a substrate. The stack structure includes insulating layers and gate electrodes alternately and repeatedly stacked on the substrate. The vertical channel structures penetrate the stack structure. Conductive pads are disposed on the vertical channel structures. An etch stopper covers sidewalls of the conductive pads. Pad contacts are disposed on the conductive pads to be in contact with the conductive pads. The pad contacts are further in contact with the etch stopper.
Public/Granted literature
- US20160043100A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2016-02-11
Information query
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