Invention Grant
- Patent Title: Magnetoresistive random access memory devices and methods of manufacturing the same
- Patent Title (中): 磁阻随机存取存储器件及其制造方法
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Application No.: US14804321Application Date: 2015-07-20
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Publication No.: US09543357B2Publication Date: 2017-01-10
- Inventor: Seung-Pil Ko , Myoung-Su Son , Kil-Ho Lee
- Applicant: Seung-Pil Ko , Myoung-Su Son , Kil-Ho Lee
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2014-0091885 20140721
- Main IPC: H01L27/22
- IPC: H01L27/22 ; H01L43/08 ; H01L43/02 ; H01L43/12

Abstract:
An MRAM device comprises an insulating interlayer comprising a flat first upper surface on a first region and a second region of a substrate. A pattern structure comprising pillar-shaped magnetic tunnel junction (MTJ) structures and a filling layer pattern between the MTJ structures is formed on the insulating interlayer of the first region. The pattern structure comprises a flat second upper surface that is higher than the first upper surface. Bit lines are formed on the pattern structure that contact top surfaces of the MTJ structures. An etch-stop layer is formed on the pattern structure between the bit lines of the first region and the first upper surface of the first insulating interlayer of the second region. A first portion of an upper surface of the etch-stop layer on the first region is higher than a second portion of the upper surface of the etch-stop layer on the second region.
Public/Granted literature
- US20160020249A1 MAGNETORESISTIVE RANDOM ACCESS MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2016-01-21
Information query
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