Invention Grant
- Patent Title: Semiconductor devices and methods for manufacturing the same
- Patent Title (中): 半导体器件及其制造方法
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Application No.: US14440787Application Date: 2012-12-04
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Publication No.: US09543450B2Publication Date: 2017-01-10
- Inventor: Huilong Zhu
- Applicant: Institute of Microelectronics, Chinese Academy of Sciences
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: McDermott Will & Emery LLP
- Priority: CN201210441230 20121107
- International Application: PCT/CN2012/085826 WO 20121204
- International Announcement: WO2014/071666 WO 20140515
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/66 ; H01L29/10 ; H01L29/49 ; H01L21/28 ; H01L29/423 ; H01L29/51 ; H01L21/265

Abstract:
Semiconductor devices and methods for manufacturing the same are provided. In one embodiment, the method may include: forming a first shielding layer on a substrate, and forming one of source and drain regions with the first shielding layer as a mask; forming a second shielding layer on the substrate, and forming the other of the source and drain regions with the second shielding layer as a mask; removing a portion of the second shielding layer which is next to the other of the source and drain regions; forming a first gate dielectric layer and floating gate layer; forming a mask layer as a spacer on a sidewall of a remaining portion of the second shielding layer, and patterning the floating gate layer with the mask layer as a mask, and then removing the mask layer; and forming a second gate dielectric layer, and forming a gate conductor as a spacer on the sidewall of the remaining portion of the second shielding layer.
Public/Granted literature
- US20150325703A1 SEMICONDUCTOR DEVICES AND METHODS FOR MANUFACTURING THE SAME Public/Granted day:2015-11-12
Information query
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