Invention Grant
US09543519B2 Deposition apparatus and method of manufacturing organic light-emitting display apparatus 有权
沉积装置及制造有机发光显示装置的方法

Deposition apparatus and method of manufacturing organic light-emitting display apparatus
Abstract:
Provided are a deposition apparatus and a method of manufacturing an organic light-emitting display (OLED) apparatus, which are capable of reducing manufacturing time and manufacturing costs of the OLED apparatus. The method includes: turning a substrate such that a deposition surface of the substrate faces upward; depositing a first deposition layer on a deposition surface of a first donor mask while the deposition surface of the first donor mask faces downward; arranging the first donor mask and the substrate such that the first donor mask is above the substrate while the first deposition layer faces downward and the deposition surface of the substrate faces upward; depositing, on the deposition surface of the substrate, a part of the first deposition layer of the deposition surface of the first donor mask; and turning the substrate such that the deposition surface of the substrate faces downward.
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