Invention Grant
- Patent Title: Deposition apparatus and method of manufacturing organic light-emitting display apparatus
- Patent Title (中): 沉积装置及制造有机发光显示装置的方法
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Application No.: US14596653Application Date: 2015-01-14
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Publication No.: US09543519B2Publication Date: 2017-01-10
- Inventor: Sungsoon Im , Taewook Kang , Duckjung Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2014-0104530 20140812
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/56 ; H01L27/32

Abstract:
Provided are a deposition apparatus and a method of manufacturing an organic light-emitting display (OLED) apparatus, which are capable of reducing manufacturing time and manufacturing costs of the OLED apparatus. The method includes: turning a substrate such that a deposition surface of the substrate faces upward; depositing a first deposition layer on a deposition surface of a first donor mask while the deposition surface of the first donor mask faces downward; arranging the first donor mask and the substrate such that the first donor mask is above the substrate while the first deposition layer faces downward and the deposition surface of the substrate faces upward; depositing, on the deposition surface of the substrate, a part of the first deposition layer of the deposition surface of the first donor mask; and turning the substrate such that the deposition surface of the substrate faces downward.
Public/Granted literature
- US20160049587A1 DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS Public/Granted day:2016-02-18
Information query
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