Invention Grant
- Patent Title: Vacuum evaporating apparatus
- Patent Title (中): 真空蒸发装置
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Application No.: US14020218Application Date: 2013-09-06
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Publication No.: US09546417B2Publication Date: 2017-01-17
- Inventor: Young-Uk Lee , Jeong-Won Han
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-Do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2013-0027487 20130314
- Main IPC: C23C14/24
- IPC: C23C14/24 ; F16K51/02 ; F16K1/20 ; F16K1/16 ; F16K31/53
Abstract:
A vacuum evaporating apparatus includes a driving unit, a linear-moving portion connected to the driving unit to move linearly, a rotational-moving portion connected to the linear-moving portion to move rotationally, and a shutter portion connected to the rotational-moving portion to pivot.
Public/Granted literature
- US20140264120A1 VACUUM EVAPORATING APPARATUS Public/Granted day:2014-09-18
Information query
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