Invention Grant
US09546434B2 High-temperature process improvements using helium under regulated pressure 有权
在调节压力下使用氦气进行高温工艺改进

High-temperature process improvements using helium under regulated pressure
Abstract:
A method for minimizing unwanted ancillary reactions in a vacuum furnace used to process a material, such as growing a crystal. The process is conducted in a furnace chamber environment in which helium is admitted to the furnace chamber at a flow rate to flush out impurities and at a predetermined pressure to achieve thermal stability in a heat zone, to minimize heat flow variations and to minimize temperature gradients in the heat zone. During cooldown helium pressure is used to reduce thermal gradients in order to increase cooldown rates.
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