Invention Grant
US09546434B2 High-temperature process improvements using helium under regulated pressure
有权
在调节压力下使用氦气进行高温工艺改进
- Patent Title: High-temperature process improvements using helium under regulated pressure
- Patent Title (中): 在调节压力下使用氦气进行高温工艺改进
-
Application No.: US12873388Application Date: 2010-09-01
-
Publication No.: US09546434B2Publication Date: 2017-01-17
- Inventor: Frederick Schmid , David B. Joyce , John Brouillette , Daniel P. Betty , Ryan Philpott
- Applicant: Frederick Schmid , David B. Joyce , John Brouillette , Daniel P. Betty , Ryan Philpott
- Applicant Address: US NH Merrimack
- Assignee: GTAT Corporation
- Current Assignee: GTAT Corporation
- Current Assignee Address: US NH Merrimack
- Agency: Parker Ibrahim & Berg LLC
- Agent Stephen D. LeBarron
- Main IPC: C30B11/00
- IPC: C30B11/00 ; C30B15/00 ; C30B29/20

Abstract:
A method for minimizing unwanted ancillary reactions in a vacuum furnace used to process a material, such as growing a crystal. The process is conducted in a furnace chamber environment in which helium is admitted to the furnace chamber at a flow rate to flush out impurities and at a predetermined pressure to achieve thermal stability in a heat zone, to minimize heat flow variations and to minimize temperature gradients in the heat zone. During cooldown helium pressure is used to reduce thermal gradients in order to increase cooldown rates.
Public/Granted literature
- US20110048316A1 High-Temperature Process Improvements Using Helium Under Regulated Pressure Public/Granted day:2011-03-03
Information query
IPC分类: