Invention Grant
US09546868B2 Modal decoupling via flexure-based transmissions as applied to a micromachined tuning fork gyroscope 有权
通过基于弯曲传动的模态解耦应用于微加工音叉陀螺仪

Modal decoupling via flexure-based transmissions as applied to a micromachined tuning fork gyroscope
Abstract:
A gyroscope includes a first mass, a second mass, and a drive structure configured to drive each of the first mass and the second mass in a drive mode. The drive structure includes a first portion and a second portion, with the first portion being configured to drive the first mass in a direction along a drive axis and the second portion being configured to drive the second mass in a direction opposite to the first mass along the drive axis. The gyroscope further includes a sense structure configured to sense motion of each of the first mass and the second mass in a sense mode along a direction substantially perpendicular to the drive axis, and a plurality of flexures configured to couple the first portion to the second portion and further configured to decouple the drive mode and the sense mode.
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