Invention Grant
US09546869B2 Vibrator element, method of manufacturing vibrator element, vibrator, electronic device, electronic apparatus and moving body
有权
振动元件，制造振子元件的方法，振动器，电子设备，电子设备和移动体
- Patent Title: Vibrator element, method of manufacturing vibrator element, vibrator, electronic device, electronic apparatus and moving body
- Patent Title (中): 振动元件，制造振子元件的方法，振动器，电子设备，电子设备和移动体
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Application No.: US15097869Application Date: 2016-04-13
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Publication No.: US09546869B2Publication Date: 2017-01-17
- Inventor: Keiichi Yamaguchi , Seiichiro Ogura , Takayuki Kikuchi , Ryuta Nishizawa , Seiji Osawa
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2012-162384 20120723
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5621 ; G01C19/5628 ; G01C19/5607
Abstract:
A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.
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