Invention Grant
US09546918B2 Sensor element, force detection device, robot, electronic component transport device, electronic component inspection device, and component processing device
有权
传感器元件，力检测装置，机器人，电子部件输送装置，电子部件检查装置以及部件处理装置
- Patent Title: Sensor element, force detection device, robot, electronic component transport device, electronic component inspection device, and component processing device
- Patent Title (中): 传感器元件，力检测装置，机器人，电子部件输送装置，电子部件检查装置以及部件处理装置
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Application No.: US14524481Application Date: 2014-10-27
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Publication No.: US09546918B2Publication Date: 2017-01-17
- Inventor: Nobuyuki Mizushima , Toshiyuki Kamiya , Hiroki Kawai
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-227699 20131031; JP2013-227700 20131031; JP2013-227701 20131031
- Main IPC: H01L41/083
- IPC: H01L41/083 ; G01L1/16 ; B25J19/02
Abstract:
A sensor element includes, when three axes orthogonal to one another are set to be an A-axis, a B-axis, and a C-axis, first piezoelectric plate that is configured to have an X cut quartz crystal plate and outputs a charge in response to an external force along the A-axis direction, second piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction with the first piezoelectric plate, and outputs a charge in response to the external force in the B-axis direction, and third piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction so as to interpose the second piezoelectric plate between the first piezoelectric plate and the third piezoelectric plate and be arranged to turn around the A-axis, and outputs a charge in response to the external force in the C-axis direction.
Public/Granted literature
Information query
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