Invention Grant
US09547095B2 MEMS-based rotation sensor for seismic applications and sensor units having same
有权
用于地震应用的基于MEMS的旋转传感器和具有相同的传感器单元
- Patent Title: MEMS-based rotation sensor for seismic applications and sensor units having same
- Patent Title (中): 用于地震应用的基于MEMS的旋转传感器和具有相同的传感器单元
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Application No.: US14104806Application Date: 2013-12-12
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Publication No.: US09547095B2Publication Date: 2017-01-17
- Inventor: Maxime Projetti , Olivier Vancauwenberghe , Nicolas Goujon , Hans Paulson
- Applicant: WESTERNGECO L.L.C.
- Applicant Address: US TX Houston
- Assignee: WESTERNGECO L.L.C.
- Current Assignee: WESTERNGECO L.L.C.
- Current Assignee Address: US TX Houston
- Agent Kevin B. McGoff
- Main IPC: G01V1/00
- IPC: G01V1/00 ; G01V1/16 ; G01P15/125 ; G01V1/38 ; G01V1/18 ; G01C19/5712

Abstract:
The present disclosure is directed to a MEMS-based rotation sensor for use in seismic data acquisition and sensor units having same. The MEMS-based rotation sensor includes a substrate, an anchor disposed on the substrate and a proof mass coupled to the anchor via a plurality of flexural springs. The proof mass has a first electrode coupled to and extending therefrom. A second electrode is fixed to the substrate, and one of the first and second electrodes is configured to receive an actuation signal, and another of the first and second electrodes is configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode. The MEMS-based rotation sensor further includes closed loop circuitry configured to receive the electrical signal and provide the actuation signal. Related methods for using the MEMS-based rotation sensor in seismic data acquisition are also described.
Public/Granted literature
- US20150316667A1 MEMS-BASED ROTATION SENSOR FOR SEISMIC APPLICATIONS AND SENSOR UNITS HAVING SAME Public/Granted day:2015-11-05
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