Invention Grant
- Patent Title: Lithography apparatus, and method of manufacturing article
- Patent Title (中): 平版印刷设备和制造方法
-
Application No.: US14590379Application Date: 2015-01-06
-
Publication No.: US09547242B2Publication Date: 2017-01-17
- Inventor: Atsushi Ito , Nobushige Korenaga
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-017744 20140131
- Main IPC: G03B27/44
- IPC: G03B27/44 ; G03B27/54 ; G03F7/20 ; G01B11/26 ; G01B9/02

Abstract:
The present invention provides a lithography apparatus which forms a pattern on a substrate, the apparatus including an optical unit including a plurality of optical systems each of which irradiates the substrate with a beam for forming the pattern and which are arranged in at least one of a first direction and a second direction orthogonal to an optical axis thereof, and a pair of interferometers configured to measure a rotation angle of the optical unit around an axis parallel to the optical axis, wherein a distance between measurement axes of the pair of interferometers is not small than longer one of a distance between optical axes of two optical systems, of the plurality of optical systems, farthest away from each other in the first direction and a distance between optical axes of two optical systems, of the plurality of optical systems, farthest away from each other in the second direction.
Public/Granted literature
- US20150219447A1 LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2015-08-06
Information query